Abstract : Anodic aluminum oxide (AAO) layers with nano-sized pores have been used as shadow masks for the fabrication of two-dimensional (2D) metal nanodot arrays (NDAs). However, the localized surface plasmon resonance (LSPR) of size-controlled NDAs fabricated using AAO masks has not been much studied. In this study, we report on the improved preparation method and utilization of an ultrathin AAO mask for the fabrication of 2D plasmonic metal NDAs. The greatest challenge in preparing an AAO mask is to control the pore diameter and to make it reproducible. AAO masks with size-controlled pores were reproducibly prepared using a two-step chemical wet etching method. Ag NDAs with different dot diameters (42, 60, and 80 nm) and Ag, Cu, and Au NDAs with dot a diameter of 80 ± 5 nm were fabricated on indium tin oxide glass substrates using AAO masks. The wavelengths corresponding to LSPR of 2D metal NDAs were investigated using ultraviolet–visible spectroscopy. Our results show that AAO masks with tunable pores can be used as shadow masks for the fabrication of 2D plasmonic NDAs.